What are the primary factors that influence the resolution and quality of pattern transfer in photolithography?

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What are the primary factors that influence the resolution and quality of pattern transfer in photolithography?
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Solution 1

Photolithography, a process used in microfabrication to pattern parts of a thin film, is influenced by several factors that determine the resolution and quality of pattern transfer. Here are the primary factors:

  1. Wavelength of Light: The resolution in photolithography is inversely proportional to Knowee AI StudyGPT is a powerful AI-powered study tool designed to help you to solve study prob
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Knowee AI StudyGPT is a powerful AI-powered study tool designed to help you to solve study problem.
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